Preparation of Aluminum Nitride by Electric Arc Method
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چکیده
منابع مشابه
Preparation and Characterization of Aluminum Nitride Thin Films with the Potential Application in Electro-Acoustic Devices
In this work, aluminum nitride (AlN) thin films with different thicknesses were deposited on quartz and silicon substrates using single ion beam sputtering technique. The physical and chemical properties of prepared films were investigated by different characterization technique. X-ray diffraction (XRD) spectra revealed that all of the deposited films have an amorphous str...
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ژورنال
عنوان ژورنال: NIPPON KAGAKU KAISHI
سال: 1973
ISSN: 2185-0925,0369-4577
DOI: 10.1246/nikkashi.1973.1869